| 摘要 |
PURPOSE:To enable easy compensation for the discrepancy of a transfer picture due to the expansion or contraction of a sample by providing a compensating mechanism for the discrepancy of the picture consisting of coils placed facing each other on both sides of a beam other than a focusing magnet for generating a focusing magnetic field. CONSTITUTION:A coil 21 for adjusting isotropic magnification and a coil 22 for adjusting anoisotropic magnification are each provided between a vacuum container 1 and a focusing magnet 11. The coil 21 consists of two circular coils 21a, 21b placed face to face along the direction to which a sample 3 and a mask 5 face and connected in series so that a current flows toward an opposite direction. This can correct the linear expansion or contraction of the sample 3, i.e., the isotropic expansion or contraction of a sample can be corrected by driving the coil 21 for adjusting isotropic magnification and the anisotropic expansion or contraction of a sample can be corrected by driving the coil 21 for adjusting isotropic magnification and the coil 22 for adjusting anisotropic magnification. |
