| 摘要 |
PURPOSE:To check generation of plasma discharge by giving an electrostatic sealding means between a getter and a coil. CONSTITUTION:An electrostatic sealding plate 8 is arranged between a getter 3 and a coil 4. One end of said electrostatic plate 8 is earthed. The electrostatic sealding plate 8 is required not to decay a high frequency magnetic field from outside so as, for example, to fix a copper wire 10 almost in parallel on an insulation sheet 9 while opening one side of said copper wire 10 and earthing the other side by shortcircuiting. Thereby, plasma discharge can be completely checked. |
