Piezoelectric device and method of production of such a device

摘要

Piezoelectric device comprising at least two electrodes which are electrically insulated from each other by a material including a piezoelectric powder and comprising means for connecting these electrodes to an electrical magnitude measurement system, characterised in that the electrodes are constituted by a conducting layer, in that the material including the piezoelectric powder is constituted by an insulating layer and in that these layers are deposited on a substrate so as to form a microcircuit, the insulating layer being disposed between two conducting layers and zones being reserved on each conducting layer so as to be able to make the electrical contacts with the measurement system there. In one embodiment of the invention, this device is characterised in that the conducting layers on the one hand and the piezoelectric layer on the other hand are produced by the deposition of serigraphable (silk-screen printable) compositions which are respectively conducting and piezoelectric onto a substrate in accordance with a technique which is compatible with the production of hybrid microcircuits. Application: detecting mechanical and acoustic vibrations by hybrid integrated circuits.