| 摘要 |
<p>PURPOSE:To perform equipotential inspection between elements and inspect connections easily and securely by recording wiring connections between elements in the mask layout drawing of a semiconductor integrated circuit with conductive ink. CONSTITUTION:The aluminum wiring parts (hatched in figure) between elements in the mask layout drawing of the semiconductor integrated circuit is recorded with the conductive ink. Then, continuity of a terminal of a resistance R1, the collector terminal of a transistor (TR) Q1, a terminal of a resistance R2, and the collector terminal of a TRQ2 is checked by using a tester to inspect the circuit. Consequently, the opening of a fine gap between, for example, the resistances R1 and R2 which is difficult to be found by manual inspection is easily detected and connection inspection is performed easily and securely.</p> |
