FABRICATION OF DEVICES INVOLVING LITHOGRAPHIC PROCEDURES
摘要
Process for fabrication of devices utilizing novel extremely useful compositions for delineation of materials. These compositions include a polymer having segments that are at least (10) monomer units long of a first entity and segments again at least (10) monomer units long of a second entity. The monomer units are chosen so that each segment type provides a specific chemical characteristic to the polymer.
申请公布号
WO8601616(A1)
申请公布日期
1986.03.13
申请号
WO1985US01056
申请日期
1985.06.05
申请人
AMERICAN TELEPHONE & TELEGRAPH COMPANY
发明人
BATES, FRANK, STEVEN;HARTNEY, MARK, ALAN;NOVEMBRE, ANTHONY, EDWARD