发明名称 FABRICATION OF DEVICES INVOLVING LITHOGRAPHIC PROCEDURES
摘要 Process for fabrication of devices utilizing novel extremely useful compositions for delineation of materials. These compositions include a polymer having segments that are at least (10) monomer units long of a first entity and segments again at least (10) monomer units long of a second entity. The monomer units are chosen so that each segment type provides a specific chemical characteristic to the polymer.
申请公布号 WO8601616(A1) 申请公布日期 1986.03.13
申请号 WO1985US01056 申请日期 1985.06.05
申请人 AMERICAN TELEPHONE & TELEGRAPH COMPANY 发明人 BATES, FRANK, STEVEN;HARTNEY, MARK, ALAN;NOVEMBRE, ANTHONY, EDWARD
分类号 G03C1/00;G03F7/00;G03F7/004;G03F7/038;G03F7/075;H01L21/30;(IPC1-7):G03F7/10 主分类号 G03C1/00
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