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发明名称
摘要
申请公布号
JPS618356(B2)
申请公布日期
1986.03.13
申请号
JP19820149055
申请日期
1982.08.30
申请人
USHIO ELECTRIC INC
发明人
ARAI TETSUHARU
分类号
F27D11/02;C21D1/34;F27B9/06;H01L21/20;H01L21/205;H01L21/22;H01L21/26;H05B3/00
主分类号
F27D11/02
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代理人
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