| 摘要 |
PURPOSE:To meke the observation eliminating the turning or the reversal of an image in the magnifications from several tens magnifications to tens of thousands magnifications possible by providing 6 stage lens at the rear of a specimen, and setting their polarity in accordance with given rule, and always making the image of a specimen image in the stages. CONSTITUTION:In the magnifications lower than thousand magnifications by means of the setting of lens polarity, the first stage real image 9 is formed by an objective lens 3, the first and the second intermidiate lens 4, 5, and the second stage real image 10 is formed by the thired and the fourth intermediate lens 6, 7, and the third stage real image 11 is formed on a recording screen by a projecting lens 8. Further, in low or middle magnificatins and middle are high magnifications more than thousand magnifications, the first stage real image 9 is formed by the lens 3, 4, and the second stage real image 10 is formed by the lens 5, 6, 7, and the third stage real image 11 is formed by the lens 8. Thus, the image system of an electron microscope is constituted in such a manner as mentioned above. Accordingly, it is possible to restrain the mode between the low magnification and the middle and the high magnification and the reversal or the turning of the image for the change of the magnification, and to reduce the aberration from an axis. |
