Method for correction of the spherical abberation and the astigmatism of an eccentric light beam in reflecting optics

摘要

The invention relates to a method for correction of the spherical abberation and astigmatism of an eccentric light beam in reflecting optics. The correction can be carried out using a plano-concave cylindrical lens or using a spherical mirror. By using the correction mirror, the number of light refracting, scattering and absorbing surfaces is considerably reduced in comparison with the use of the plano-concave cylindrical lens, since no special detector optics are required for focusing the light beam.