TEMPERATURE CONTROL FOR USE IN ION IMPLANTATION APPARATUS

摘要

During treatment of a specimen (10) in an evacuated chamber, the temperature of the specimen is controlled by varying the radiant heat flux to and from the specimen. The specimen is supported adjacent to but spaced apart from a heat sink (14) with a blackened surface (16), and between the specimen (10) and the heat sink (14) are one or more reflective elements (20) movable so as to cover a larger or a smaller fraction of the surface of the heat sink.