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经营范围
发明名称
VACUUM PROCESSING APPARATUS
摘要
申请公布号
GB8601905(D0)
申请公布日期
1986.03.05
申请号
GB19860001905
申请日期
1986.01.27
申请人
BOC GROUP INC
发明人
分类号
B65G49/00;C23C14/56;H01L21/677;(IPC1-7):C23C14/56
主分类号
B65G49/00
代理机构
代理人
主权项
地址
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