| 摘要 |
PURPOSE:To enable a space to be minimized and the time required for carrying to be reduced in a device as referred to the titled where a wafer is put in or out by arranging a carrying device in a place which is common to each of carriers. CONSTITUTION:A hand 24 is moved to the specified position of a carrier 21 while it is moved up and down, then a wafer 23 is pulled out and is raised to the upmost position. After being rotated by 90 deg., it is supplied to the main device 2 while it is extended. The same procedure is followed to the carrier 23 with the hand 24 rotated by 180 deg.. Arranging the hand commonly to the carriers 21 and 22 enables the space to be common and to be utilized effectively. |
