| 摘要 |
<p>A miniature solid state fluid flow sensor having a low diffusivity substrate (10), such as a polymer film, which is optionally mounted on a thermally conductive base. A resistor strip (12) on the substrate is connected to an electrical oscillator (16) and thus emits thermal waves which are propagated through the fluid at a rate dependent on a fluid flow component perpendicular to the strip. A thermoelectric detector (20), spaced from one side or each side of the strip, senses the thermal waves; and detector circuitry (26, 28, 30, 31) determines the time or phase shift due to fluid flow.</p> |
