METHOD OF PRODUCING INTEGRATED CIRCUIT CHIP,申请号JP19850103652-传众专利搜索

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发明名称	METHOD OF PRODUCING INTEGRATED CIRCUIT CHIP
摘要
申请公布号	JPS6144470(A)	申请公布日期	1986.03.04
申请号	JP19850103652	申请日期	1985.05.15
申请人	DIGITAL EQUIP CORP	发明人	ANDORIYUU ERU UU
分类号	H01L29/78;H01L21/027;H01L21/033;H01L21/28;H01L21/336;H01L21/76;H01L21/762;H01L21/768;H01L21/8234;H01L29/417	主分类号	H01L29/78
代理机构		代理人
主权项
地址

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