| 摘要 |
<p>Field effect transistors are manufactured using a substrate of compound semiconductor material by defining two gate areas which have their longitudinal dimensions so oriented with respect to the crystal axes of the substrate that the substrate material is more readily etchable through one of the gate areas than through the other gate area. The semiconductor material is etched through both the gate areas simultaneously with the same etchant, whereby gate recesses of different respective depths are formed in the substrate. Metal is deposited into the recesses.</p> |
