| 摘要 |
PURPOSE:To correct a movable body for performing three dimensional motion in three-dimensional direction with high accuracy by providing a three-dimensional length measuring device for detecting the movement in axial direction and the displacements in two directions crossing perpendicularly with the axis of moving shaft. CONSTITUTION:A movable body 10 will feed motion command signals X0-Z0 for respective shaft X-Z from NC controller 100 then from controllers XC, YC, ZC through drive section DU to servo motors MX, MY, MZ. SX, SY, SZ are three-dimensional length measuring devices to detect the movements in the direction of X-Z axes while to detect the zigzag displacement in two directions perpendicular against the motion in axial direction under uniaxial motion. In other word, the three-dimensional length measuring device SX will produce the movement X1 in the direction of X-axis of the movable body 10 and the displacements DELTAY, DELTAZ in the directions of Y and Z axes. The motor MX is controlled such that the movement X1 will match with the movement command signal X0 while corrective motion is performed in the direction for cancelling the displacements DELTAY, DELTAZ through the controllers YC, ZC. |
