| 摘要 |
PURPOSE:To unnecessitate the trouble of accurately positioning a pellet again on a heating block after detection of the bonding position, by a method wherein currents of air are formed between the pellet and an optical system for video- monitoring the upper surface of the pellet. CONSTITUTION:The pellet 1 is carried to a required position on the heating block 5 by a lead frame that is the supporter, and is then heated to a required temperature. At this time, rising current of air generate above the pellet 1, resulting in heat haze. However, this wire bonding method produces micro currents of air by means of a fan 3 and causes the rising current of air to be blown away out of the field of vision of the optical system. Thereby, the distortion of the monitored image becomes very small. Therefore, this manner enables the detection of bonding position on the pellet and the bonding to be carried out at the same position and can increase the accuracy of the bonding position. |
