发明名称 RECOGNIZING DEVICE FOR OUTWARD APPEARANCE
摘要 PURPOSE:To prevent a decrease in outward appearance recognition precision due to a rising current of air by forming an air flow in the space between a heated body and an outward appearance recognizing means which detects the body through an optical system. CONSTITUTION:A fan 3 for producing a fine hierachical air flow at right angles to the optical axis 4 of an objective lens 2 is provided between a pellet 1 to be treated and the lens 2 of the optical system (microscope). The pellet 1 is conveyed to a specific position on a heating block 5 and heated up to specific temperature. At this time, the rising air current is produced over the pellet 1 to cause schlieren, but the fine air flow is produced by the fan 3 to blow the rising air flow out of the visual field of the optical system, so that the distortion of a monitored image is reduced greatly.
申请公布号 JPS6143715(A) 申请公布日期 1986.03.03
申请号 JP19850158157 申请日期 1985.07.19
申请人 HITACHI LTD 发明人 AMADA HARUO;HORII MASAHIRO
分类号 H01L21/66;G02B27/02;H01L21/60 主分类号 H01L21/66
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