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发明名称
TWO DIMENSIONAL MICROODISPLACEMENT DETECTOR
摘要
申请公布号
JPS54150161(A)
申请公布日期
1979.11.26
申请号
JP19780057600
申请日期
1978.05.17
申请人
KOGYO GIJUTSUIN
发明人
TSUDA NOBUHIRO
分类号
G01D5/04;G01B5/012;G01B5/20;G01B7/00;G01B21/00;G01B21/20;G01D5/22
主分类号
G01D5/04
代理机构
代理人
主权项
地址
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