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发明名称
FORMATION OF COMPOUND SEMICONDUCTOR SINGLE CRYSTAL THIN FILM
摘要
申请公布号
JPS6143413(A)
申请公布日期
1986.03.03
申请号
JP19840164825
申请日期
1984.08.08
申请人
RES DEV CORP OF JAPAN;NISHIZAWA JUNICHI
发明人
NISHIZAWA JUNICHI
分类号
H01L21/205;C23C16/44
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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