FORMATION OF THIN ZNS FILM

摘要

PURPOSE:To prevent the generation of small projections on a thin film and to obtain the thin film satisfactory for use in an electric field light emitting element in the stage of forming the thin film by an electron beam heating type vacuum method by providing shielding and heating bodies to prevent the direct sticking of an evaporating material to a substrate. CONSTITUTION:An evaporating source (sintered ZnS body) 3 provided in a vacuum bell-jar 1 to be evacuated by an oil diffusion pump 2 is heated by an electron beam 4 to evaporate. The evaporated substance 5 contg. solid particles collides against the plural shielding and heating bodies 6 provided between the source 3 and the substrate 7. The bodies 6 consist of quartz pipes 8 having a prescribed diameter and heater coils 9 contained therein and are set at the prescribed temp. by controlling the electric power of an electric power source 10. The substance 5 colliding against the body 6 is then temporarily stuck to the surface of the bodies 6 and is thereafter evaporated therefrom in the form of molecular ZnS by the heat of the surface thereof. The evaporated particles are stuck to the surface of the substrate 7. The uniform thin film is thus formed.