| 摘要 |
PURPOSE:To perform positioning with high accuracy by providing reference faces in the X, Y and Z directions on a loading member, pressing down the upper face, the side and the back of the stem by use of push-rods disposed movably opposite to these three reference faces, pushing the stem to the reference faces and positioning the stem. CONSTITUTION:When a stem 2 clamped by a stem clamper 17 is loaded on a loading member 14 of a mount base 12, the stem clamper 17 is opened and push-rods 15a, 15b and 15c are advanced by an air cylinder 16 .... Accordingly, the stem 2 is pressed on reference faces 14a, 14b and 14c and the stem 2 is set at a fixed position. Using a position measuring device 27, the stem 2 and chips 3 are automatically positioned at the positions in mounting by slightly moving a mount base 12. Next, when a chip holder 24 is made to fall by an up and down moving mechanism 23, the chips 3 absorbed in a vacuum pin 25 are fusion bonded on the stem. This allows the stem to be positioned with high accuracy and moreover, automatically. |
