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发明名称
GAS PURGE DEVICE FOR MOLECULAR PUMP
摘要
申请公布号
JPS6143297(A)
申请公布日期
1986.03.01
申请号
JP19840164591
申请日期
1984.08.06
申请人
OSAKA SHINKU KIKI SEISAKUSHO:KK
发明人
KANETO SHIGERU;IGUCHI MASASHI
分类号
F04D19/04
主分类号
F04D19/04
代理机构
代理人
主权项
地址
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