| 摘要 |
PURPOSE:To manufacture easily the zirconia film of a desired thickness on a substrate by forming a zirconium octylate film on the substrate and subjecting it to oxidative thermal decomposition. CONSTITUTION:Zirconium octylate is diluted with a solvent and applied to the substrate of quartz glass or the like to form a zirconium octylate film. This film is baked at >=about 400 deg.C to manufacture a zirconia film by oxidative thermal decomposition. By this method the zirconia film can be manufactured simply and easily with high reproducibility. When zirconium octylate is mixed with other metallic octylate such as yttrium octylate, diluted with a solvent, applied to the substrate, and subjected to oxidative thermal decomposition, a stabilized zirconia film can be manufactured. |
