| 摘要 |
PURPOSE:To accurately stepwisely feed linearly by providing a piezoelectric element coupled directly with a movable element of a linear motor, and controlling the distortion of the size by controlling to alter a control voltage to be applied to the element. CONSTITUTION:The movable element 1 of a linear motor is controlled to be driven by controlling the exciting polarity and switching of stator coils 4a, 4b. A piezoelectric element 10 coupled directly with the element 1 is elongated or contracted by the piezo effect by applying a voltage between terminals E and F, and finely controlled in the elongating or contracting size by the applied voltage. The distortion of the arbitrary size can be controlled by controlling to alter the control voltage applied to the element 10. |
