| 摘要 |
PURPOSE:To recognize the position of components in specific position relation by irradiating one large plane of a component which has an uneven surface with a light beam from a parallel finite observation surface, and recognizing positions of the uneven surface characteristic to the component surface. CONSTITUTION:When a semiconductor chip component 5 is irradiated with the light beam from the observation surface 6, the route 9 of a light beam which is reflected by a plane parallel to the observation surface is the same. The route 11 of a light reflected by a slanting part forming a recessed surface part 10 never returns to the observation surface. This is cut on the basis of a specific threshold value and then an area showing a plane part parallel to the observation surface is formed on the observation surface. An area 12 showing a recessed surface part 10 in specific position relation of the radiation direction with a light emission source is similar to a previously given area, etc., sandwiched between two areas showing other planes, and smaller in area than the two areas, so that it is selected from all areas. The, the axis where the rotary moment of the area 12 is minimum is calculated and the radiation direction of a laser beam 7 and the position of the light emission source 8 are known from the position and direction of the axis. |
