| 摘要 |
PURPOSE:To remove oil mists in the stage for forming substrates and contaminants after the formation and to obtain defectless disks by subjecting the resin substrates for the optical disks to specific cleaning using freon then combining stages for generating ions and blowing clean air. CONSTITUTION:The resin substrates 2 for the optical disks are taken out of a molding machine and the plural substrates are arrayed in a housing vessel 18 which is then put into an emulsion tank 8 contg. the emulsion prepd. by adding water and surface active agent to CCl2F-CClF2 (freon). The substrates are cleaned by an ultrasonic wave generator 9 in said tank. The substrates are then transferred into a tank 10 contg. only the freon and are cleaned by using an ultrasonic wave generator 11; thereafter the substrates are immersed on the freon under heating by a heater 13 in a tank 12 contg. only the freon. The substrates are transferred into a freon vapor cleaning tank 14 where the substrates are cleaned by the vapor formed by heating and evaporating the freon by a heater 15 and the air ionized by being passed through an ion generator 16 from a clean air blower 17. The oil mists in the stage of forming the surface of the substrates 2 and the dust, etc. after the formation are thus thoroughly removed and the generation of defects such as pinholes is obviated in the stage of forming a recording film, etc. on the substrates. |
