发明名称 |
Centrifugal wafer processor |
摘要 |
In a rinser/dryer for carriers of semiconductor wafers, a rotatable frame containing the carrier is directly mounted to, and cantilevered from the drive motor. A container encloses the rotatable frame and carrier. A gas pressurized labyrinth seal separates the inside of the container from the drive motor to prevent contamination. A raised portion in the labyrinth seal, with gas inlets on each side of the raised portion, forms a pressure barrier inhibiting the passage of moisture and contaminates across the barrier.
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申请公布号 |
US4571850(A) |
申请公布日期 |
1986.02.25 |
申请号 |
US19840611522 |
申请日期 |
1984.05.17 |
申请人 |
THE FLUOROCARBON COMPANY |
发明人 |
HUNT, JAMES R.;BALENT, RUSSELL P. |
分类号 |
F26B5/08;F26B25/00;H01L21/00;(IPC1-7):F26B25/00;F26B11/02;F27D1/18 |
主分类号 |
F26B5/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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