| 摘要 |
<p>PURPOSE:To prevent electrodes from the reduction of performance by forming an insulating film on mother metal and forming an auxiliary electrode connecting a metallic electrode with a transparent electrode on a panel substrate having the metallic electrode on its insulating film. CONSTITUTION:Mother metal 2 such as Ta is applied to a substrate 1 such as a glass plate by an evaporating method using an electron gun and the auxiliary electrode 6 is simultaneously patterned to form the auxiliary electrode 6 similar to the mother metal 2. Then, the insulator 3 and the transparent electrode 4 are formed similarly to the ordinary method. In addition, the metallic electrode 5 consisting of Cr or Au which connects the insulator 3 with the transparent electrode 4 is formed.</p> |
