| 摘要 |
PURPOSE:To improve yield and obtain a high performance ultrasonic probe by forming in a lamination of a piezoelectric element and an impedance matching layer grooves extending in a direction perpendicular to the longitudinal direction of the piezoelectric element at an interval greater than a necessary interval and filling the grooves with an adhesive. CONSTITUTION:Grooves are formed in a lamination of a piezoelectric element, which has an electrode layer formed on each side of a piezoelectric substrate 2, and an impedance matching layer 6. The grooves extend in a direction perpendicular to the longitudinal direction of the piezoelectric element. They are formed at an interval D greater than a necessary interval (d). The grooves 8, which have a depth reaching a flexible cable 4a, constitute electrode isolation sections as borderline between adjacent oscillating elements 10 corresponding to respective channels. The other grooves 9 are formed they do not completely separate the piezoelectric element. The grooves 8 and 9 are filled with an epoxy system adhesive 7. Then, the surface of the impedance matching layer 6 is sufficiently wiped, and the adhesive 7 is then hardened. In this way, the individual oscillating elements 10 are reinforced. |
