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发明名称
ROTARY CARRIER
摘要
申请公布号
JPS6139542(A)
申请公布日期
1986.02.25
申请号
JP19840158752
申请日期
1984.07.31
申请人
TOSHIBA CORP
发明人
WATANABE TAKAO;SUEMATSU MUTSUMI;CHIBA KOICHI;KANEDA KATSUHIKO
分类号
H01L21/677;H01L21/67;H01L21/68
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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