| 摘要 |
PURPOSE:To improve the yield and to make the manufacture efficient by using the same shape of a marker of photo mask at a position depending on each kind of device in the manufacture of a surface acoustic wave device. CONSTITUTION:After a comb type input/output electrode 2 is arranged on a substrate 1 with a comb line electrode photo mask A by the photo etching, a piezoelectric thin film 3 is formed on it, and a short-circuit electrode 4 is provided on the film 3 with a short-circuit electrode photo mask B by the photo etching. Then the pad alignment is applied by using a pad alignment photo mask C for read wire bonding. In this case, each photo mask is aligned by using the same shape of marker 5 at a position depending on each kind of device. |
