| 摘要 |
PURPOSE:To improve the mechanical strength, the heat resistance and the workability and to decrease the variation with time of the element characteristics, by forming a first superconductor layer of Be or a Be alloy while forming a tunnel barrier layer of a Be oxide. CONSTITUTION:An electron beam is applied to a Be-Re alloy material within a vacuum bell jar, so that a Be-Re alloy layer 2 is adhered on a glass substrate 1. A photoresist film 20 is provided on the Be-Re alloy layer 2 and exposed to ultraviolet beams through a mask. Then, only the part not exposed to the light is selectively removed with a developing liquid. After the removal of the resist film 20, another photoresist film is provided. The photoresist is exposed to light while the surface thereof is masked except for the region on the Be-Re alloy layer 2, and developed so as to provide a structure as shown in Fig. (g). The structure is then exposed to the atmosphere at room temperature so that the Be-Re alloy layer 2 is oxidized to form a tunnel barrier layer 3. This sample is again introduced into the vacuum bell jar 1 so that a Bo coating film 4 is formed, and the resist film 30 is solved and removed to provide a configuration as shown in Fig. (j). Thus, a tunnel-junction Josephson element can be obtained. |
