,申请号JP19840114052U-传众专利搜索

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法人/股东/高管

发明名称
摘要
申请公布号	JPS6130238(U)	申请公布日期	1986.02.24
申请号	JP19840114052U	申请日期	1984.07.26
申请人		发明人
分类号	C23C14/50;H01L21/31;H01S5/00;(IPC1-7):H01L21/31;H01S3/18	主分类号	C23C14/50
代理机构		代理人
主权项
地址

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