发明名称 FOERFARANDE OCH ANORDNING FOER UTFAELLNING AV ETT TUNNT SKIKT AV EN FOERENING INNEHAOLLANDE MINST EN KATJONISK KOMPONENT OCH MINST EN ANJONISK KOMPONENT PAO ETT SUBSTRAT.
摘要 The invention relates to a process for the depositing on a substrate a thin film or layer of a compound having at least one cationic constituent C and at least one anionic constituent A, such as zinc sulphide. On the substrate are formed at least two superimposed ionic layers respectively incorporating the said cationic constituent or constituents C and the said anionic constituent or constituents A by successively immersing the substrate in a first solution e.g. containing a salt of C, such as zinc sulphate and in a second solution eg containing a salt of A, such as sodium sulphide, while rinsing the substrate between two immersion operations.
申请公布号 FI853232(L) 申请公布日期 1986.02.24
申请号 FI19850003232 申请日期 1985.08.22
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 NICOLAU, YANN FLORENT
分类号 H01L33/00;C23C18/00;C23C26/00;C30B7/00;H01L21/368;H01L31/04 主分类号 H01L33/00
代理机构 代理人
主权项
地址