| 摘要 |
PURPOSE:The titled material which has good moldability with minimized liberation of carbonaceous components while keeping the essential characteristics of a polymeric material, made by incorporating conductive carbon and pulverized carbon fibers into a polymeric material. CONSTITUTION:An antistatic polymeric material made by incorporating 1- 10wt% conductive carbon (e.g. carbon black) and 5-20wt% pulverized carbon fibers (preferably of a diameter of about 3-30mum and an average length of 10- 10,000mum) into 60-95wt% polymeric material (e.g. a copolymer of tetrafluoroethylene and a perfluoroalkyl vinyl ether). This material retains the chemical and heat resistances of the polymeric material, has good moldability with minimized liberation of carbonaceous components, and is antistatic; therefore, it can be used suitably for a jig to hold a semiconductor substrate. |
