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发明名称
VAPOR SHEATHED BAKING OF SEMICONDUCTOR WAFERS
摘要
申请公布号
GB8412830(D0)
申请公布日期
1984.06.27
申请号
GB19840012830
申请日期
1984.05.18
申请人
GCA CORPORATION
发明人
分类号
H01L21/20;F27B19/02;F27D7/04;H01L21/324;H01L21/67;(IPC1-7):C30B35/00
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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