发明名称 MANUFACTURE OF MOS SEMICONDUCTOR DEVICE
摘要 PURPOSE:To shorten a turn-around time of device manufacture, by transferring an information writing process to a post-process. CONSTITUTION:In a case where an information is written in a MOS cell transistor, an N<+> type layer 16 in a silicon substrate 11 under a source electrode window 19 is selectively etched to form a removed section. Next, over the entire face of the silicon substrate 11, an aluminium film is coated, and then source, gate and drain electrodes 23, 24, 25 are formed using a photo resist pattern as a mask. Thereafter, the silicon substrate 11 is heat-treated in an inert gas atmosphere. Aluminum Al of a program pattern being formed at the source electrode window 19 is diffused in the direction of the depth in the N<+> type layer 16 contacting with it, is penetrated through the N<+> type layer 16 to short the P-N junction, and reaches the silicon substrate 11, thereby to write an information.
申请公布号 JPS6135552(A) 申请公布日期 1986.02.20
申请号 JP19840156704 申请日期 1984.07.27
申请人 TOSHIBA CORP 发明人 FUKADA HIDE
分类号 G11C17/08;H01L21/8246;H01L27/10;H01L27/112;H01L29/78 主分类号 G11C17/08
代理机构 代理人
主权项
地址