| 摘要 |
PURPOSE:To display a defective part of a pattern clearly by a method wherein an inspection apparatus is composed of a detecting part which detects two patterns, a comparing which compares the detection signals and a display part which displays a pattern image in accordance with the compared result. CONSTITUTION:Two pattern signals detected by a pattern detecting part 8 are transmitted to a comparing part 11 and compared by a comparing circuit 14 by every picture element. If both signal levels conform to a prescribed relation, the pattern signals are put into a coincidence memory with a coordinate signal and if they do not, into a non-coincidence memory. A display part 17 receives the signals from the memories 15, 16 and sets different darkness signals and color signals corresponding to the picture element of coincident coordinates and the picture element of non-coincident coordinate and displays a pattern image on a monitor TV19 in accordance with those signals. With this constitution, the defective part of the pattern can be clearly displayed and corrected easily and accurately. |
