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发明名称
GROWING DEVICE OF SEMICONDUCTOR CRYSTAL
摘要
申请公布号
JPS6134923(A)
申请公布日期
1986.02.19
申请号
JP19840153973
申请日期
1984.07.26
申请人
RES DEV CORP OF JAPAN;NISHIZAWA JUNICHI;ABE HITOSHI
发明人
NISHIZAWA JUNICHI;ABE HITOSHI
分类号
H01L21/205;C30B25/10;H01L21/268
主分类号
H01L21/205
代理机构
代理人
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