Hybrid optical integrated circuit and fabrication method thereof.

摘要

A hybrid optical integrated circuit having a high-silica glass optical waveguide (32) formed on a silicon substrate (31), an optical fiber (34) and an optical device (36, 38) coupled optically to the optical waveguide (32), and an optical fiber guide (33) and an optical device guide (35, 37) on the substrate (31) for aligning the optical fiber (34) and the optical device (36, 38) at predetermined positions, respectively, relative to the optical waveguide (32). Islands (42a-42j) carrying electrical conductors (45a, 45b) are disposed on the substrate (31). A first electrical conductor film (43) is formed on the substrate (31). Second electrical conductor films (45a, 45b) are formed on the top surfaces of the optical waveguide (32), the optical fiber guide (33), the optical device guide (35, 37) and the islands (42a-42j) and are electrically isolated from the first electrical conductor film (43). An electrical conductor member (44) is provided to feed electric power from the first and second electric conductor films (43, 45a, 45b) to the optical device (36, 38) which needs the power supply. The optical waveguide (32), the optical fiber guide (33), the optical device guide (35, 37) and the islands (42a-42j) are formed from the same high-silica glass optical waveguide film. Alignment of various portions is facilitated when assembling the circuit. A high coupling efficiency is realized with a low cost.