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发明名称
DECISION RESULT CONTROL CIRCUIT OF IC TESTING DEVICE
摘要
申请公布号
JPS6135371(A)
申请公布日期
1986.02.19
申请号
JP19840155577
申请日期
1984.07.27
申请人
HITACHI ELECTRONICS ENG CO LTD
发明人
KAMIYA RYOHEI;MURAKOSHI SHIGEYOSHI;SODA YOSHIKAZU
分类号
G01R31/28;H01L21/66
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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