METHOD AND APPARATUS FOR PROVIDING OPTICAL LAYER MADE OF SILICON COMPOUND ON SUBSTRATE,申请号JP19850099745-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR PROVIDING OPTICAL LAYER MADE OF SILICON COMPOUND ON SUBSTRATE
摘要
申请公布号	JPS6134501(A)	申请公布日期	1986.02.18
申请号	JP19850099745	申请日期	1985.05.13
申请人	LEYBOLD HERAEUS GMBH	发明人	PEETAA BUIRUTSU
分类号	C23C14/14;C23C14/06;C23C14/34;C23C14/36;G02B1/10;G02B5/28	主分类号	C23C14/14
代理机构		代理人
主权项
地址

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