| 摘要 |
PURPOSE:To obtain a desired analyzing beam by a compact device, by selectively exciting only the energy level within a specified energy range, and observing the light emitted from a selectively excited sample. CONSTITUTION:An electron beam 7 is supplied from an electron source 6 and accelerated. The supplied electrons hit an ion source 2 at a high speed, and ions are formed. The ions from the ion source are deflected by deflecting electrodes 4 and 5. The ions are selected by an energy selecting iris 9. Only the ions having special energy are selected. The selected ions hit a sample 12 on a target. The sample 12 is excited by this impact, and light is emitted. The emitted light is taken out of a light window 14 and observed. |
