| 摘要 |
PURPOSE:To form a metallic reflecting film which is deposited by evaporation and has excellent vapor deposition strength and vapor deposition quality by disposing a high-voltage electrode so as to face a base body metal and executing gaseous discharge between the same thereby removing exactly various kinds of dusts from the surface of the underlying metal and cleaning said surface. CONSTITUTION:An oscillatory scanning mirror 1 which is a work is fixed by a holder 8 in a bell-jar 5 and the high-voltage electrode 3 of stela 20 is disposed to face the specular surface 1' of the underlying metallic surface thereof. A discharge phenomenon 4 is generated between the mirror 1' and the electrode 3 by a high-voltage generator 2 and the electrode 3 is moved by the operating arm 6 of a control driving part 7. Various kinds of dusts formed on the surface 1' or sticking thereto are thus exactly removed over the entire area thereof and the surface is thus cleaned. Alor the like is thereafter deposited by evaporation on the cleaned surface 1' by a vapor deposition device 10, by which the metallic reflecting film having high reliability is formed. |
