| 摘要 |
<p>The short distance between parallel surfaces (3,5) is measured by a sensor (7) comprising two parallel superimposed and insulated conductive plates (9,11). These are supplied with the same HF signal (pref. between 100 kHz and 10 MHz) from a generator (7) at the same voltage (up to 100V peak-to-peak). - The current generated is detected (19) between the second surface (5) and the plate (11) nearest to it. Its value varies inversely with the intervening distance (D), from which the overall sepn. (d+D) between the two surfaces (3,5) can be found.</p> |
