摘要 |
PURPOSE:To obtain a jet head so as not to generate an inferior product by clogging, by integrating a base plate having guide grooves each larger than each of fine nozzle as an upper plate by diffusion bonding and providing a nozzle plate having a fine groove at the end surface thereof after mirror surface finishing by diffusion bonding. CONSTITUTION:An upper plate 6 is superposed to a base plate 1 and both of them are integrated by diffusion bonding to form a bonded head 11 and both end surfaces 12, 12 are subjected to finishing processing to be flushed to each other. A nozzle plate 8 subjected to mirror surface finishing and having fine nozzles 9 formed thereto by discharge processing is superposed to the end surfaces 12 and both of them are integrated by diffusion bonding. In this case, the nozzle plate 8 is superposed to the end surfaces 12 so that the guide grooves 2 mutually coincide with the inner center positions of the fine nozzles 9. |