| 摘要 |
PURPOSE:To obtain the titled device which is easy of manufacture and has a high mass-productivity with high reliability by a method wherein the third substrate having a recess is provided, and a sensor substrate and a matrix substrate are fixed in this recess, which is then closed with a lid. CONSTITUTION:The substrate 11 has a recess 12, in which the sensor substrate 2 and the matrix substrate 3 are fixed at the bottom. The sensor substrate 2 is provided with a photoelectric conversion element C which receives light through an aperture (a) provided in the substrate 11. Matrix wirings are formed on the matrix substrate 3. The photoelectrix conversion elememt C of the sensor substrate 2 is connected to the matrix wirings of the matrix substrate 3 with conductors 6. The lid 13 covering the recess 12 of the substrate 11 contains an IC14. Since the lid 13 is completely adhered to the subsrate 17, light does not come into the recess 12 in the state of closing the lid 13. Therefore, the element C requires no light shielding film because of light incidence only through the aperture (a). Further, since the lid 13 completely protects the element C and the conductors 6, a protection film and the like are not needed. |
