| 摘要 |
PURPOSE:To make a straightness obtainable with higher accuracy by finding the straightness of an object to be measured and the straightness of the guide face and the pitching at the time of moving a detector fitting base by estimating three pieces of parameters. CONSTITUTION:Let X0 be the error in straightness of the guide face which is in a measurement starting position, X1 that in the 1st position, Y1 the straightness error of the object to be measured in the 1st position, Y2 that in the 2nd position and the straightness YK+2 of said guide face in (K+2)th position is calculated by an equation I, and the straightness of said guide face is guessed and calculated by correcting the value of XK+2 which is calculated on K=0, 1, 2... by three pieces of parameters alpha=X1, beta=2Y1-Y2, gamma=X0 relating to the X0, X1 and Y1, Y2 which are found with calculating so as to make the mean square value of the straightness error the minimum, and the straightness error YK+2 of the object for measurement in this position and the pitching thetaK+2 in front and rear directions due to the movement are calculated by equations II, III. The straightness is thus found with high accuracy. |
