| 发明名称 |
SEMICONDUCTOR STRUCTURE COMPRISING A MESA REGION, PROCESS FOR FORMING A SEMICONDUCTOR MESA; VERTICAL FIELD EFFECT TRANSISTOR AND METHOD OF FORMING A VERTICAL SEMICONDUCTOR DEVICE |
| 摘要 |
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| 申请公布号 |
EP0091548(A3) |
申请公布日期 |
1986.02.12 |
| 申请号 |
EP19830101753 |
申请日期 |
1983.02.23 |
| 申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
JACKSON, THOMAS NELSON |
| 分类号 |
H01L29/80;H01L21/28;H01L21/308;H01L21/338;H01L29/06;H01L29/417;H01L29/812;(IPC1-7):H01L29/06 |
主分类号 |
H01L29/80 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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