| 摘要 |
PURPOSE:To form a vacuum-deposited metallic film free from creases by pressing a long-sized polymer substrate traveling along the circumference of a cylindrical can for heating against the can with a heated nip roller when a metal is vacuum-deposited on the substrate. CONSTITUTION:In a vacuum vessel 2, a thin polyethylene terephthalate substrate 4 is drawn from a feed roll 3 and transferred along the circumference of a cylindrical can 5 heated to 200 deg.C. A substance to be vacuum-deposited such as ''Permalloy(R)'' is evaporated by heating with electron beams 7 from an electron gun 6, and the resulting vapor is deposited on the surface of the substrate 4 through the opening 9a in a mask 9 placed along the can 5 to form a thin film. At this time, the substrate 4 is kept in close contact with the can 5 by static electricity with a bias roller 14, and the substrate 4 is pressed against the can 5 with a pin roller 19 heated to 170 deg.C from the beginning of contact of the substrate 4 with the can 5 to the end of vacuum deposition of Permalloy. A vacuum-deposited Permalloy film on the substrate 4 is prevented from creasing. |
